Selective processes that proceed during formation of aluminum layers near the phase equilibrium in a plasma-condensate system

The mechanisms of pore formation in aluminum condensates produced using a radically new technological approach that is based on self-organized sputtering systems are studied. The main technological parameters of pore formation are found to be determined by the closeness to the phase equilibrium in the plasma-condensate system and by the predominant contribution of structural or field selectivity to atom-by-atom assembling of the condensate.