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JOURNALS // Zhurnal Tekhnicheskoi Fiziki // Archive
Zhurnal Tekhnicheskoi Fiziki, 1985 Volume 55, Issue 7, Pages 1457–1459 (Mi jtf1364)
Brief Communications

ELIMINATION OF SWIRL-DEFECTS DURING THERMAL-TREATMENT OF CRUCIBLELESS SILICON PLATES IN CHLORO-CONTAINING ATMOSPHERE

N. A. Sobolev, E. I. Shek, S. I. Dudavskiy, À. À. Kravtsov

Ioffe Physico-Technical Institute USSR Academy of Sciences, Leningrad

Received: 02.07.1984
Revised: 09.01.1985



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