Brief Communications

FORMATION OF HETEROGENEOUS COMPENSATION DOMAIN IN THE PROCESS OF OBTAINING PLANAR SILICON P-N-JUNCTIONS

N. T. Bagraev, V. A. Mashkov, R. P. Seisyan, V. L. Sukhanov, N. M. Shmidt

Ioffe Physico-Technical Institute USSR Academy of Sciences, Leningrad

Received: 25.09.1984

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