Plasma

USE OF DISCHARGE, SUSTAINED BY THE ELECTROMAGNETIC-RADIATION OF THE RANGE OF MILLIMETER WAVES, IN PLASMA CHEMISTRY

Yu. V. Bykov, S. V. Golubev, A. L. Gol'denberg, V. G. Zorin

Institute of Applied Physics, USSR Academy of Sciences, Gor'kii

UDC: 537.521

Received: 25.05.1983

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