Brief Communications

EFFECT OF SYNTHESIS CONDITIONS ON THE PHASE-COMPOSITION AND PROPERTIES OF NIOBIUM NITRIDE FILMS

I. A. Kachalova, O. A. Lebedev, T. B. Samoilova

Leningrad State Electrotechnical University

UDC: 539.216.2 : 546.882.171.1

Received: 21.06.1983

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