A. S. Ignat'ev, V. G. Mokerov, A. G. Petrova, V. A. Rybin, V. V. Saraikin, “ELECTRON AUGER-SPECTROMETRY OF THIN PLATINUM SILICIDE FILMS ON SILICON”, Zhurnal Tekhnicheskoi Fiziki, 1984, Volume 54, Issue 6,Pages <nobr>1212

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Zhurnal Tekhnicheskoi Fiziki, 1984 Volume 54, Issue 6, Pages 1212–1214 (Mi jtf1844)

Brief Communications

ELECTRON AUGER-SPECTROMETRY OF THIN PLATINUM SILICIDE FILMS ON SILICON

A. S. Ignat'ev, V. G. Mokerov, A. G. Petrova, V. A. Rybin, V. V. Saraikin

UDC: 539.216.2

Received: 15.07.1983

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