V. E. Borisenko, D. I. Zarovskiy, V. A. Labunov, A. N. Larsen, “GROWTH OF TITANIUM DISILICIDES DURING THE 2ND THERMAL-TREATMENT OF TITANIUM FILMS ON SILICON”, Zhurnal Tekhnicheskoi Fiziki, 1986, Volume 56, Issue 5,Pages <nobr>981

Brief Communications

GROWTH OF TITANIUM DISILICIDES DURING THE 2ND THERMAL-TREATMENT OF TITANIUM FILMS ON SILICON

V. E. Borisenko, D. I. Zarovskiy, V. A. Labunov, A. N. Larsen

Minsk Institute of Radio Technology

UDC: 539.216.2

Received: 29.07.1985