RUS  ENG
Full version
JOURNALS // Zhurnal Tekhnicheskoi Fiziki // Archive
Zhurnal Tekhnicheskoi Fiziki, 1983 Volume 53, Issue 5, Pages 943–945 (Mi jtf2350)
Brief Communications

QUESTION OF THE PREPARATION OF PHOTORESISTIVE LATTICE MASKS

V. A. Gavrilin, L. V. Obukhov




Bibliographic databases:

© Steklov Math. Inst. of RAS, 2025