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// Zhurnal Tekhnicheskoi Fiziki
// Archive
Zhurnal Tekhnicheskoi Fiziki,
1988
Volume 58,
Issue 1,
Pages
132–135
(Mi jtf2715)
PASSIVATING PROPERTIES OF SILICON-OXIDES APPLIED ON THE SURFACE OF SILICON HIGH-VOLTAGE P-N TRANSITIONS BY THE CATHODE-REACTIVE SPUTTERING
V. M. Volle
,
V. B. Voronkov
,
V. A. Kozlov
, E. Shteinbais
, K. Shtenbek
, V. Ekke
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Steklov Math. Inst. of RAS
, 2025