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JOURNALS // Zhurnal Tekhnicheskoi Fiziki // Archive

Zhurnal Tekhnicheskoi Fiziki, 1988 Volume 58, Issue 1, Pages 132–135 (Mi jtf2715)

PASSIVATING PROPERTIES OF SILICON-OXIDES APPLIED ON THE SURFACE OF SILICON HIGH-VOLTAGE P-N TRANSITIONS BY THE CATHODE-REACTIVE SPUTTERING

V. M. Volle, V. B. Voronkov, V. A. Kozlov, E. Shteinbais, K. Shtenbek, V. Ekke




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