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// Zhurnal Tekhnicheskoi Fiziki
// Archive
Zhurnal Tekhnicheskoi Fiziki,
1988
Volume 58,
Issue 3,
Pages
559–566
(Mi jtf2784)
HIGH-ENERGY ION-IMPLANTATION
A. F. Burenkov
,
F. F. Komarov
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Steklov Math. Inst. of RAS
, 2025
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