Brief Communications

MATHEMATICAL-MODELING OF NONSTATIONARY MASS-TRANSFER PROCESSES IN GAS-EPITAXIAL REACTOR VOLUME UNDER GROWING THE STRUCTURES BY THE MOS-HYDRIDE TECHNIQUE

A. I. Zhmakin, O. V. Kovalenkov, I. A. Kuzmin, Yu. N. Makarov, A. A. Fursenko, B. S. Yavich

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