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JOURNALS
// Zhurnal Tekhnicheskoi Fiziki
// Archive
Zhurnal Tekhnicheskoi Fiziki,
1989
Volume 59,
Issue 6,
Pages
160–162
(Mi jtf3373)
Brief Communications
POTENTIAL USE OF ALPHA-ARSENIC IN VACUUM X-RAY-LITHOGRAPHY
B. A. Olshvanger
,
V. L. Kantsyrev
,
A. S. Shlyaptseva
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Steklov Math. Inst. of RAS
, 2024
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