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JOURNALS // Zhurnal Tekhnicheskoi Fiziki // Archive
Zhurnal Tekhnicheskoi Fiziki, 1986 Volume 56, Issue 9, Pages 1700–1708 (Mi jtf341)
Theoretical and Mathematical Physics

MATHEMATICAL-MODELING OF PROCESSES IN FLOW-TYPE GAS-EPITAXIAL REACTORS

A. I. Zhmakin, I. P. Ipatova, Yu. N. Makarov

Ioffe Physico-Technical Institute USSR Academy of Sciences, Leningrad

UDC: 621.382.002

Received: 08.08.1985



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