V. V. Boiko, A. T. Rakhimov, N. V. Suetin, “MATHEMATICAL-MODELING OF PLANAR-TYPE HIGH-FREQUENCY REACTOR IN RADICAL ETCHING”, Zhurnal Tekhnicheskoi Fiziki, 1990, Volume 60, Issue 11,Pages <nobr>65

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Zhurnal Tekhnicheskoi Fiziki, 1990 Volume 60, Issue 11, Pages 65–76 (Mi jtf4057)

Gas Discharges, Plasmas

MATHEMATICAL-MODELING OF PLANAR-TYPE HIGH-FREQUENCY REACTOR IN RADICAL ETCHING

V. V. Boiko, A. T. Rakhimov, N. V. Suetin

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