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JOURNALS
// Zhurnal Tekhnicheskoi Fiziki
// Archive
Zhurnal Tekhnicheskoi Fiziki,
1991
Volume 61,
Issue 3,
Pages
158–160
(Mi jtf4207)
Brief Communications
LOW-TEMPERATURE ION-PLASMA DEPOSITION OF METALLIC COATINGS CONTAINING GAS-PHASE COMPONENT COMPOUNDS
A. I. Aksenov
, L. N. Puchkareva
,
A. M. Tolopa
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Steklov Math. Inst. of RAS
, 2025
Fulltext:
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