T. I. Benyushis, M. I. Vasilevskii, B. V. Gurylev, S. N. Ershov, A. B. Ozerov, “HIGH-FREQUENCY DISCHARGE IN HELIUM USED FOR PLASMA-CHEMICAL PLATING OF SEMICONDUCTING-FILMS FROM ORGANOMETALLIC COMPOUNDS”, Zhurnal Tekhnicheskoi Fiziki, 1991, Volume 61, Issue 6,Pages <nobr>37

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Zhurnal Tekhnicheskoi Fiziki, 1991 Volume 61, Issue 6, Pages 37–44 (Mi jtf4286)

Gas Discharges, Plasmas

HIGH-FREQUENCY DISCHARGE IN HELIUM USED FOR PLASMA-CHEMICAL PLATING OF SEMICONDUCTING-FILMS FROM ORGANOMETALLIC COMPOUNDS

T. I. Benyushis, M. I. Vasilevskii, B. V. Gurylev, S. N. Ershov, A. B. Ozerov

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