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JOURNALS
// Zhurnal Tekhnicheskoi Fiziki
// Archive
Zhurnal Tekhnicheskoi Fiziki,
1991
Volume 61,
Issue 10,
Pages
184–186
(Mi jtf4457)
Brief Communications
FORMATION OF NEW PHASE UNDER THE INJECTION OF MOLECULAR AND ATOMIC NITROGEN-IONS TO SILICON
E. Y. Chernyak
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Steklov Math. Inst. of RAS
, 2025