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JOURNALS // Zhurnal Tekhnicheskoi Fiziki // Archive

Zhurnal Tekhnicheskoi Fiziki, 1991 Volume 61, Issue 10, Pages 184–186 (Mi jtf4457)

Brief Communications

FORMATION OF NEW PHASE UNDER THE INJECTION OF MOLECULAR AND ATOMIC NITROGEN-IONS TO SILICON

E. Y. Chernyak




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