V. V. Dunaev, A. G. Zhiglinskiĭ, V. S. Sukhomlinov, E. N. Fafurina, “DETERMINATION OF ULTIMATE SELECTIVE COEFFICIENTS OF HOLLOW-CATHODE SPUTTERING IN HYDROGEN PLASMA”, Zhurnal Tekhnicheskoi Fiziki, 1992, Volume 62, Issue 2,Pages <nobr>41

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Zhurnal Tekhnicheskoi Fiziki, 1992 Volume 62, Issue 2, Pages 41–46 (Mi jtf4556)

Gas Discharges, Plasmas

DETERMINATION OF ULTIMATE SELECTIVE COEFFICIENTS OF HOLLOW-CATHODE SPUTTERING IN HYDROGEN PLASMA

V. V. Dunaev, A. G. Zhiglinskiĭ, V. S. Sukhomlinov, E. N. Fafurina

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