N. A. Bert, K. Yu. Pogrebickii, I. P. Soshnikov, Y. N. Yurev, “PRINCIPLES OF GAAS(001) SPUTTERING BY AR+ IONS WITH 1-9 KEV ENERGY”, Zhurnal Tekhnicheskoi Fiziki, 1992, Volume 62, Issue 4,Pages <nobr>162

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Zhurnal Tekhnicheskoi Fiziki, 1992 Volume 62, Issue 4, Pages 162–170 (Mi jtf4637)

Experimental Instruments and Techniques

PRINCIPLES OF GAAS(001) SPUTTERING BY AR+ IONS WITH 1-9 KEV ENERGY

N. A. Bert, K. Yu. Pogrebickii, I. P. Soshnikov, Y. N. Yurev

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