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JOURNALS // Zhurnal Tekhnicheskoi Fiziki // Archive

Zhurnal Tekhnicheskoi Fiziki, 1986 Volume 56, Issue 11, Pages 2255–2258 (Mi jtf466)

Brief Communications

MASS-SPECTRAL INVESTIGATION OF THE INDIUM LIQUID-METAL ION-SOURCE

A. N. Pustovit, V. I. Zjila

Institute of Microelectronics Technology and High-Purity Materials RAS

UDC: 537.534.2

Received: 16.10.1985



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© Steklov Math. Inst. of RAS, 2024