A. N. Protsenko, “EFFECT OF THE OVERSPUTTERING PROCESS ON THE ETCHING RATE AND THE CRATER DEPTH”, Zhurnal Tekhnicheskoi Fiziki, 1986, Volume 56, Issue 11,Pages <nobr>2267

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Zhurnal Tekhnicheskoi Fiziki, 1986 Volume 56, Issue 11, Pages 2267–2268 (Mi jtf471)

Brief Communications

EFFECT OF THE OVERSPUTTERING PROCESS ON THE ETCHING RATE AND THE CRATER DEPTH

A. N. Protsenko

UDC: 537.534.8

Received: 04.11.1985

Fulltext: PDF file (215 kB)

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