N. N. Rudyk, O. I. Il'in, M. V. Il'ina, S. A. Khubezhov, A. A. Fedotov, O. A. Ageev, “Influence of PECVD method parameters on the growth of carbon nanotubes for nanopiezotronic devices”, Zhurnal Tekhnicheskoi Fiziki, 2021, Volume 91, Issue 10,Pages <nobr>1517

XXV International Symposium on Nanophysics and Nanoelectronics, Nizhny Novgorod, March 9--12, 2021
Physics of nanostructures

Influence of PECVD method parameters on the growth of carbon nanotubes for nanopiezotronic devices

N. N. Rudyk^a, O. I. Il'in^a, M. V. Il'ina^a, S. A. Khubezhov^b, A. A. Fedotov^a, O. A. Ageev^ac

^a Institute of Nanotechnologies, Electronics and Equipment Engineering
^b North Ossetian State University after Kosta Levanovich Khetagurov, Vladikavkaz
^c Research and Education Center "Nanotechnology", Southern Federal University, Taganrog

Abstract: The results of experimental studies of the influence of the growth temperature and the thickness of the catalytic layer on the geometric and structural parameters of carbon nanotubes (CNTs) are presented. It is shown that the use of a TiN-based sublayer makes it possible to provide a low resistivity during the direct growth of CNTs on a conducting contact. It was found that for the formation of the best piezoelectric response, it is necessary to form the most defective CNTs. It is shown that the degree of defectiveness of CNTs can be controlled during their growth. A relationship has been established between the geometric and structural parameters of CNTs that affect the piezoelectric response. The potential applicability of CNTs for the creation of nanopiezotronic devices (nanogenerators, energy nanocarvesters) on their basis is shown.

Keywords: carbon nanotubes, PECVD, nanopiezotronics, piezoelectric response, raman spectroscopy.

Received: 02.04.2021
Revised: 02.04.2021
Accepted: 02.04.2021

DOI: 10.21883/JTF.2021.10.51365.96-21