The use of medium-energy atom beams for solid-state PIXE diagnostics

The possibilities of medium (hundreds of keV) energy ion beams usage for solid state PIXE diagnostics is examined. The method modification, consisting in the utilizing of neutral beams as the probe, is proposed. It is shown, that transition to such beams makes it possible to exclude the negative influence of effects, caused by the appearance of the surface potential due to charge accumulation in case of insulating samples study.