L. A. Fomin, I. V. Malikov, V. A. Berezin, A. V. Chernykh, A. B. Loginov, B. A. Loginov, “Probe microscopy and electron-transport properties of thin mo epitaxial films on sapphire”, Zhurnal Tekhnicheskoi Fiziki, 2020, Volume 90, Issue 11,Pages <nobr>1830

This article is cited in 2 papers

XXIV International Symposium Nanophysics and Nanoelectronics, Nizhny Novgorod, March 10--13, 2020
Solids

Probe microscopy and electron-transport properties of thin mo epitaxial films on sapphire

L. A. Fomin^a, I. V. Malikov^a, V. A. Berezin^a, A. V. Chernykh^a, A. B. Loginov^b, B. A. Loginov^c

^a Institute of Microelectronics Technology and High-Purity Materials RAS, Chernogolovka, Moscow oblast, Russia
^b Lomonosov Moscow State University
^c National Research University of Electronic Technology

Abstract: We have analyzed the surface and electron-transport properties of thin molybdenum epitaxial films. Experimental results are compared with available quantum models of the influence of the film surface relief on their resistance.

Keywords: epitaxial films, refractory metals, interconnections, rough surface, atomic force microscopy.

Received: 01.04.2020
Revised: 01.04.2020
Accepted: 01.04.2020

DOI: 10.21883/JTF.2020.11.49970.110-20