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Zhurnal Tekhnicheskoi Fiziki, 2020 Volume 90, Issue 10, Pages 1677–1680 (Mi jtf5180)

This article is cited in 1 paper

Solids

Possibilities of the master mask method in analysis of characteristics of planar HTSC structures depending on superconducting film thickness

D. V. Masterova, S. A. Pavlova, A. E. Parafinab, P. A. Yunina

a Institute of Microstructure Physics, Russian Academy of Sciences, Federal Research Center Institute of Applied Physics (Branch), Russian Academy of Sciences, Nizhny Novgorod, Russia
b Lobachevsky State University of Nizhny Novgorod

Abstract: In contrast to traditional methods for obtaining planar superconducting structures based on YBCO films, in which the topology is formed by etching or ion implantation, the topology in the master mask (MM) method is set at the initial stage of structure preparation, during the MM formation, and the YBCO deposition is the final stage. The superconducting elements of the structure are formed in MM windows, and insulating regions appear between them. Having fixed the topology of superconducting bridges at the MM formation stage, we measured their characteristics depending on the YBCO film thickness, performing deposition cycles sequentially. After each YBCO deposition cycle, we measured the structure parameters of the film as well as the critical temperature and current in the bridges, including the bridges with the Josephson junctions formed on a bicrystal substrate.

Keywords: YBCO films, preliminary topology mask, planar HTSC-structure, Josephson junction.

Received: 11.09.2019
Revised: 18.03.2020
Accepted: 19.03.2020

DOI: 10.21883/JTF.2020.10.49799.313-19


 English version:
Technical Physics, 2020, 65:10, 1605–1608

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