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Zhurnal Tekhnicheskoi Fiziki, 2020 Volume 90, Issue 10, Pages 1750–1757 (Mi jtf5190)

This article is cited in 3 papers

Solid-State Electronics

Physical and technological characteristic features of the process of installation of dies onto a temporary foundation in internal wiring technology

D. V. Vertyanova, N. E. Korobovaa, A. V. Pogudkina, V. D. Kravtsovab

a National Research University of Electronic Technology
b Bekturov Institute of Chemical Sciences, Almaty

Abstract: The physical and technological characteristic features of the installation of dies onto a temporary foundation in the internal wiring technology are studied. The justified selection of the material for the fixation of silicon dies active side down onto a temporary foundation from various solutions of polyamic acids (PAAs) is performed. The experimental dependence of the adhesion strength of silicon dies on the lifetime of the solutions of PAAs is found. The possible defects formed upon the imidization of PAAs in the process of creation of highly integrated microassemblies, multidie modules, and electronic modules of the “system in package” level are shown.

Keywords: technology, internal mounting, polyimide, defects, module.

Received: 11.09.2019
Revised: 13.02.2020
Accepted: 18.02.2020

DOI: 10.21883/JTF.2020.10.49809.315-19


 English version:
Technical Physics, 2020, 65:10, 1677–1684

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© Steklov Math. Inst. of RAS, 2024