Resistivity of thin carbon films with different $sp$-bonds fractions

Carbon films with different extents of $sp$ hybridization have been grown by ion–plasma pulsed arc sputtering of graphite in a methane atmosphere. Using Raman scattering and transmission electron microscopy data, it has been shown that the content of the phase including carbon chains with $sp$ hybridization grows with increasing methane concentration in the working volume. The resistivity of carbon films correlates well with the fraction of $sp$-hybridized carbon in the films.