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Zhurnal Tekhnicheskoi Fiziki, 2019 Volume 89, Issue 11, Pages 1656–1662 (Mi jtf5454)

This article is cited in 1 paper

XXIII International Symposium on Nanophysics and Nanoelectronics, Nizhny Novgorod, March 11-14, 2019

Emission properties of laser plasma excited on molecular-cluster carbon dioxide jets

A. N. Nechaia, A. A. Perekalovab, N. I. Chkhaloa, N. N. Salashchenkoa

a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
b National Research Lobachevsky State University of Nizhny Novgorod

Abstract: We report on the results of investigation of a gas-jet laser-plasma source of extreme ultraviolet radiation based on a conical supersonic nozzle. As a target, we used molecular-cluster CO$_2$ jets. Different regimes of the gas flow were obtained by varying the gas parameters at the gas inlet and the influence of these regimes on the emission and technical characteristics of the radiation source was analyzed. It has been shown experimentally that radiation emission is intensified upon an increase in the amount of clustered material in the jet.

Keywords: ñlusters, laser-plasma radiation source, laser spark, extreme ultraviolet radiation.

Received: 28.03.2019
Revised: 28.03.2019
Accepted: 15.04.2019

DOI: 10.21883/JTF.2019.11.48324.131-19


 English version:
Technical Physics, 2019, 64:11, 1566–1572

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