M. M. Barysheva, S. A. Garakhin, S. Yu. Zuev, V. N. Polkovnikov, N. N. Salashchenko, M. V. Svechnikov, R. M. Smertin, N. I. Chkhalo, E. Meltchakov, “Optimization of composition, synthesis, and study of broadband multilayer mirrors for the EUV spectral range”, Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 89, Issue 11,Pages <nobr>1763

This article is cited in 7 papers

XXIII International Symposium on Nanophysics and Nanoelectronics, Nizhny Novgorod, March 11-14, 2019

Optimization of composition, synthesis, and study of broadband multilayer mirrors for the EUV spectral range

M. M. Barysheva^a, S. A. Garakhin^a, S. Yu. Zuev^a, V. N. Polkovnikov^a, N. N. Salashchenko^a, M. V. Svechnikov^a, R. M. Smertin^a, N. I. Chkhalo^a, E. Meltchakov^b

^a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
^b Laboratoire Charles Fabry, Institut d'Optique Graduate School, Palaiseau, France

Abstract: The article is devoted to the development, fabrication and analysis of broadband Mo/Si and Mo/Be stack-design multilayer mirrors for the wavelength ranges of 11.1-13.8, 17–21 and 28–33 nm. It is shown that for these structures smooth reflection curves can be achieved in a small number of corrections of the technological process.

Keywords: EUV, broadband mirrors, aperiodic mirrors, stack structures, reflectometer with laser-plasma source.

Received: 28.03.2019
Revised: 28.03.2019
Accepted: 15.04.2019

DOI: 10.21883/JTF.2019.11.48341.116-19