D. S. Kvashennikov, S. Yu. Zuev, V. N. Polkovnikov, N. N. Salashchenko, N. I. Chkhalo, F. Delmotte, E. Meltchakov, “Multilayer Ag/Y mirrors for the spectral range of 9–11 nm”, Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 89, Issue 11,Pages <nobr>1774

This article is cited in 2 papers

XXIII International Symposium on Nanophysics and Nanoelectronics, Nizhny Novgorod, March 11-14, 2019

Multilayer Ag/Y mirrors for the spectral range of 9–11 nm

D. S. Kvashennikov^ab, S. Yu. Zuev^a, V. N. Polkovnikov^a, N. N. Salashchenko^a, N. I. Chkhalo^a, F. Delmotte^c, E. Meltchakov^c

^a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
^b Lobachevsky State University of Nizhny Novgorod
^c Laboratoire Charles Fabry, Institut d'Optique Graduate School, Palaiseau, France

Abstract: Multilayer Ag/Y mirrors intended for the spectral range of 9–11 nm have been investigated. The parameters of mirrors, specifically, the thicknesses of transition layers, have been determined. The efficiency of B$_4$C and Si barrier layers has been demonstrated. It has been shown that the properties of structures like Ag/Y and Ag/Y with B$_4$C and Si barriers layers have poor temporal stability. The highest reflection coefficient of 18% at a wavelength of 9.34 nm, has been observed for the Ag/Si/Y structure. The same structure has the best temporal stability.

Received: 28.03.2019
Revised: 28.03.2019
Accepted: 15.04.2019

DOI: 10.21883/JTF.2019.11.48343.129-19