S. Yu. Zuev, R. S. Pleshkov, V. N. Polkovnikov, N. N. Salashchenko, M. V. Svechnikov, N. I. Chkhalo, F. Schäfers, M. G. Sertsu, A. Sokolov, “Influence of beryllium barrier layers on the properties of Mo/Si multilayer mirrors”, Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 89, Issue 11,Pages <nobr>1779

This article is cited in 4 papers

XXIII International Symposium on Nanophysics and Nanoelectronics, Nizhny Novgorod, March 11-14, 2019

Influence of beryllium barrier layers on the properties of Mo/Si multilayer mirrors

S. Yu. Zuev^a, R. S. Pleshkov^a, V. N. Polkovnikov^a, N. N. Salashchenko^a, M. V. Svechnikov^a, N. I. Chkhalo^a, F. Schäfers^b, M. G. Sertsu^b, A. Sokolov^b

^a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
^b Helmholtz-Zentrum Berlin, Berlin, Germany

Abstract: The performance of multilayer Mo/Si mirrors with B$_{4}$C and Be spacers near a wavelength of 13.5 nm has been studied. It has been shown that four-component Mo/Si/B$_{4}$C mirrors outperform Mo/Si and Mo/Si/B$_{4}$C mirrors in reflection coefficient by 2.0 and 1.3%, respectively. In addition, Mo/Si mirrors offer the widest transmission band width at half maximum ($\Delta\lambda_{1/2}$ = 0.535 nm). An explanation for these findings has been given.

Keywords: X-radiation, multilayer mirrors, magnetron sputtering.

Received: 28.03.2019
Revised: 28.03.2019
Accepted: 15.04.2019

DOI: 10.21883/JTF.2019.11.48344.130-19