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Zhurnal Tekhnicheskoi Fiziki, 2019 Volume 89, Issue 11, Pages 1807–1812 (Mi jtf5479)

This article is cited in 1 paper

XXIII International Symposium on Nanophysics and Nanoelectronics, Nizhny Novgorod, March 11-14, 2019

Formation of magnetic nanostructures using an atomic force microscope probe

A. G. Temiryazeva, M. P. Temiryazevaa, A. V. Zdoroveyshchevb, O. V. Vikhrovab, Yu. V. Nikulinc, Yu. V. Khivintsevc, S. A. Nikitovde

a Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch, Russian Academy of Sciences
b Scientific-Research Physicotechnical Institute at the Nizhnii Novgorod State University, Nizhnii Novgorod
c Saratov Branch, Kotel'nikov Institute of Radio-Engineering and Electronics, Russian Academy of Sciences
d Kotel'nikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, Moscow
e Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region

Abstract: The examples of application of pulse force nanolithography carried out using an atomic-force microscope probe for formation of magnetic nanowires, nanocontacts, one- and two-dimensional gratings with typical sizes of about 50–100 nm have been considered.

Keywords: magnetic films, lithography, nanostructures, atomic force microscopy.

Received: 28.03.2019
Revised: 28.03.2019
Accepted: 15.04.2019

DOI: 10.21883/JTF.2019.11.48349.120-19


 English version:
Technical Physics, 2019, 64:11, 1716–1721

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