Abstract:
Modification of Si(111) surface due to ion bombardment and subsequent annealing has been studied. It has been found that annealing following bombardment with 0.3- to 1.0-keV ions causes a multilayer metal silicide coating to form on the surface. It has also been established that work function $\varphi$ of Si(111) variously depends on dose at different energies of types of ions.
Keywords:ion bombardment, annealing, monolayer film, structure, work output.