Investigation of a contamination film formed by the electron beam irradiation

In the study of materials on electron probe devices in the field of action of the electron beam, a contaminating hydrocarbon film is formed, which affects the experimental results. In this paper, we have studied the influence of a contamination film on carbon-film-coated dielectrics on the intensity of cathodoluminescence and characteristic X-ray lines. The absorption coefficient of the contamination film in the visible and UV ranges has been determined. Filming mechanisms at different parameters of the electron beam have been discussed.