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Zhurnal Tekhnicheskoi Fiziki, 2018 Volume 88, Issue 10, Pages 1554–1558 (Mi jtf5800)

This article is cited in 10 papers

Optics

Absolutely calibrated spectrally resolved measurements of Xe laser plasma radiation intensity in the EUV range

P. S. Butorina, Yu. M. Zadiranovb, S. Yu. Zuevc, S. G. Kalmykovb, V. N. Polkovnikovc, M. È. Sasinb, N. I. Chkhaloc

a Peter the Great St. Petersburg Polytechnic University
b Ioffe Institute, St. Petersburg
c Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod

Abstract: With the aid of Mo/Be and Si/Mo interference mirrors, measurements of radiation intensity from laser plasma with Xe gas-jet target have been realized within a wavelength interval of 11–14 nm with a spectral resolution of 3–6 $\mathring{\mathrm{A}}$. The results are compared with the spectrum formerly measured with the aid of a spectrograph. The ratio of intensities at wavelengths of 11.2 and 13.5 nm has been found to be about 10 under experimental conditions studied.

Keywords: Extreme Ultraviolet (EUV), Plasma Radiation, Interference Mirrors, Wavelength Interval, Significant Debris Flows.

Received: 08.09.2017

DOI: 10.21883/JTF.2018.10.46501.2477


 English version:
Technical Physics, 2018, 63:10, 1507–1510

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