E. S. Demidov, V. V. Sdobnyakov, G. V. Vazenmiller, Yu. I. Chigirinskii, Yu. A. Dudin, V. P. Lesnikov, V. N. Trushin, M. S. Boldin, O. A. Belkin, A. A. Bobrov, N. V. Sakharov, “Manufacturing of sputtering composite targets containing phases of Co$_{2}$FeSi or Co$_{2}$MnSi Heusler alloy”, Zhurnal Tekhnicheskoi Fiziki, 2018, Volume 88, Issue 7,Pages 1032

This article is cited in 4 papers

Physical science of materials

Manufacturing of sputtering composite targets containing phases of Co$_{2}$FeSi or Co$_{2}$MnSi Heusler alloy

E. S. Demidov, V. V. Sdobnyakov, G. V. Vazenmiller, Yu. I. Chigirinskii, Yu. A. Dudin, V. P. Lesnikov, V. N. Trushin, M. S. Boldin, O. A. Belkin, A. A. Bobrov, N. V. Sakharov

National Research Lobachevsky State University of Nizhny Novgorod

Abstract: The paper presents a method for manufacturing mechanically strong sputtering composite targets containing the phase of the Co$_{2}$FeSi or Co$_{2}$MnSi Heusler alloy of the stoichiometric composition, which can be used for fabrication of spin electronic devices by high-frequency magnetron deposition and pulsed laser deposition of thin films.

Received: 23.10.2017

DOI: 10.21883/JTF.2018.07.46172.2528