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JOURNALS // Zhurnal Tekhnicheskoi Fiziki // Archive

Zhurnal Tekhnicheskoi Fiziki, 2018 Volume 88, Issue 6, Pages 888–891 (Mi jtf5898)

This article is cited in 2 papers

Optics

Microturbines formed with the aid of direct laser recording on photoresist

R. V. Skidanovab, O. Yu. Moiseevab, S. V. Ganchevskayaab

a Image Processing Systems Institute, Russian Academy of Sciences, Samara
b Samara State Aerospace University

Abstract: A method for fabrication of mechanical elements (microturbines) that receive torque from vortex optical beams is proposed. Experimental results on fabrication of multiple microturbines are presented. Shapes of the microturbines are measured using an optical microscope, ZYGO white-light interferometer, and electron microscope.

Received: 09.03.2016

DOI: 10.21883/JTF.2018.06.46021.1795


 English version:
Technical Physics, 2018, 63:6, 862–865

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© Steklov Math. Inst. of RAS, 2024