A. V. Tumarkin, S. V. Razumov, V. A. Vol'pyas, A. G. Gagarin, A. A. Odinets, M. V. Zlygostov, E. N. Sapego, “Thermostable ferroelectric capacitors based on graded films of barium strontium titanate”, Zhurnal Tekhnicheskoi Fiziki, 2017, Volume 87, Issue 10,Pages <nobr>1585

This article is cited in 5 papers

Physical electronics

Thermostable ferroelectric capacitors based on graded films of barium strontium titanate

A. V. Tumarkin^ab, S. V. Razumov^a, V. A. Vol'pyas^a, A. G. Gagarin^a, A. A. Odinets^a, M. V. Zlygostov^a, E. N. Sapego^a

^a Saint Petersburg Electrotechnical University "LETI"
^b Daghestan State University, Makhachkala

Abstract: The influence of the pressure of working gas during the ion–plasma sputtering on properties of deposited ferroelectric barium strontium titanate coatings has been experimentally studied. Variations in the of pressure of the working gas during deposition allows the component composition of the deposited layer to be changed, which leads to the diffusion of the phase transition and the improvement of temperature stability of properties of ferroelectric film. The gradation of layers has an impact on the temperature of the dielectric permittivity maximum, the shape of the dependence of the capacity on temperature, and the capacitance–voltage characteristics of the capacitor structures.

Received: 17.01.2017

DOI: 10.21883/JTF.2017.10.45005.2168