A. V. Volkov, N. L. Kazanskii, O. Yu. Moiseev, V. D. Paranin, S. D. Poletayev, I. V. Chistyakov, “Specific features of the laser irradiation of thin molybdenum films”, Zhurnal Tekhnicheskoi Fiziki, 2016, Volume 86, Issue 4,Pages <nobr>101

This article is cited in 6 papers

Physics of nanostructures

Specific features of the laser irradiation of thin molybdenum films

A. V. Volkov^ab, N. L. Kazanskii^ab, O. Yu. Moiseev^a, V. D. Paranin^b, S. D. Poletayev^ab, I. V. Chistyakov^c

^a Image Processing Systems Institute of the RAS, Samara, Russia
^b Samara State Aerospace University (National Research University), Samara, Russia
^c OOO Interlab, Moscow

Abstract: Laser irradiation of thin molybdenum films with a thickness of less than 100 nm is studied. An experimental hypothesis in accordance with which films of refractory metals can be laser-ablated owing to the formation of an intermediate oxide phase is experimentally proven. A threefold decrease in the thickness of the ablation region under the action of scanning laser radiation is interpreted.

Keywords: Laser Irradiation, Annealing Time, Refractory Metal, Ablation Zone, Laser Power Density.

Received: 02.03.2015