A. A. Lebedev, S. P. Lebedev, S. N. Novikov, V. Yu. Davydov, A. N. Smirnov, D. P. Litvin, Yu. N. Makarov, V. S. Levitskii, “Supersensitive graphene-based gas sensor”, Zhurnal Tekhnicheskoi Fiziki, 2016, Volume 86, Issue 3,Pages <nobr>135

This article is cited in 16 papers

Experimental instruments and technique

Supersensitive graphene-based gas sensor

A. A. Lebedev^ab, S. P. Lebedev^ab, S. N. Novikov^c, V. Yu. Davydov^a, A. N. Smirnov^ab, D. P. Litvin^ad, Yu. N. Makarov^d, V. S. Levitskii^a

^a Ioffe Institute, St. Petersburg
^b St. Petersburg National Research University of Information Technologies, Mechanics and Optics
^c Aalto University, Finland
^d Nitride Crystals Group, St.-Petersburg

Abstract: Epitaxial graphene layers are produced with the aid of thermal destruction of the surface of a semi-insulating SiC substrate. Raman spectroscopy and atomic-force microscopy are employed in the study of the film homogeneity. A prototype of the gas sensor based on the films is fabricated. The device is sensitive to the NO$_2$ molecules at a level of 5 ppb (five particles per billion). A possibility of the industrial application of the sensor is discussed.

Keywords: Graphene Layer, Thermal Destruction, Graphene Film, Graphene Monolayer, Terrace Width.

Received: 02.09.2015