X-ray diffraction in a thin crystal with non-uniform curve of reflective atomic planes

Kinematical X-ray diffraction in a curved thin crystal with depth-variable curve radius was addressed theoretically. An algorithm was developed for calculation of scattering intensity near the reciprocal lattice point from such structure using recurrent relations. Numerical simulation of X-ray diffraction in a silicon crystal was performed on four microstructure models. It is shown that reciprocal space maps of diffraction intensity distribution depend considerably on the law of crystal curve radius variation.