The effect of an electric field on the graphene hydrogenation rate in inductively coupled plasma

Results of experimental treatment of monolayer graphene in low pressure inductively coupled hydrogen-containing plasma are described herein. The effect of an electric field on the degree of hydrogenation of samples was studied. Raman scattering spectra of the samples were compared before and after the plasma treatment at various voltages on the sample with respect to a grounded chamber. A method of measuring conductive properties of samples during plasma treatment was proposed. These graphene parameters were measured depending on the plasma treatment time at various voltages on the sample. An assumption is made that the main particles that can react with graphene during plasma treatment are positive hydrogen ions.