Gas targets for point-like source of vacuum and extreme ultraviolet radiation sustained by focused electromagnetic radiation

In this work, an experimental study of various gas targets for a point-like plasma source based on a discharge in a non-uniform gas flow was carried out. As a result of the experiments, it was possible to observe the structures of injected jets for different targets with different gas inlet holes. It has been demonstrated that with a significant decrease in the pressure of the background gas, the jet practically collapses and the gas is injected evenly in all directions.