Electron lithography of non-simply patterned magnetic mesoparticles

Currently, patterned magnetic structures are of great interest in connection with their potential application in spintronics as generators of microwave radiation and memory elements. In particular, two-dimensional lattices of ferromagnetic disks, in which the vortex magnetization distribution is realized, are a promising system. In this work, the latest methods of electron lithography and ion etching have been developed, allowing for a high degree allows to get high-quality particles of a given shape and size. A study of the microstructures and magnetic states of non-simply connected magnetic particles from permalloy films was carried out using analytical and Lorentz transmission electron microscopy. The experimental results demonstrate good agreement with the data obtained by micromagnetic modeling.