Study of capacitive and inductive elements using high-quality superconducting resonators

A method for measuring the electrical parameters of integrated circuit elements using high-quality supercon- ducting resonators has been proposed and implemented. Structures were manufactured consisting of a coplanar waveguide line with resonators connected to it in a capacitive manner. The transmission spectra of a microwave signal along such a line were measured. A comparison is made of the numerical calculation of test structures with the transmission spectra measured in the experiment. The values of the coupling capacitances of the transmission line with the resonators are determined. The parameters of the resonator loads, which are capacitive and inductive elements, have been determined. The obtained values were analyzed and the reliability of the methodology used was assessed.