evelopment of a waveguide superconducting detector with photon number resolution

This work presents a superconducting single-photon detector with photon number resolution based on integrated optics on a silicon nitride platform for a wavelength of 914 nm. The detector is based on a space-time multiplexing scheme and consists of a plurality of pixel detectors connected in series by a microstrip line, which acts as a delay line and an impedance transformer. The work describes the fabrication route of the detector, the calculation of the electrical part of the detector, the influence of the number of detectors on the dynamic range of the resolution of the number of photons is assessed, and the experimental values of the critical temperature and critical current of the detector are obtained. The results of this work can be used in the design of scalable quantum optical microcircuits for ion and photon computers.