Capsule gas-filled target for a laser-plasma EUV source

A new design of a laser target – a container with a thin-film wall containing a gas under significant pressure is proposed. It is assumed (and this assumption will be tested experimentally), that, with a certain combination of design parameters, lines belonging to the gas enclosed in the target volume will prevail in the spectrum of extreme ultraviolet radiation of a laser-plasma source with such a target. The necessary experimental equipment has been developed and manufactured, including a set of identical targets with a Mo/ZrSi$_2$ membrane with a thickness of 0.19 $\mu$m. It has been experimentally demonstrated that the samples from the manufactured kit withstand a pressure of at least 1.5 atm.