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Zhurnal Tekhnicheskoi Fiziki, 2024 Volume 94, Issue 8, Pages 1240–1249 (Mi jtf6826)

XXVIII International Symposium ''Nanophysics and Nanoelectronics'', Nizhny Novgorod, March 11-15, 2024
Physical electronics

Study of electrical resistance of gallium films on reconstructed Si(111) surface

D. A. Tsukanovab, M. V. Ryzhkovaa

a Institute for Automation and Control Processes, Far Eastern Branch of the Russian Academy of Sciences, 690041 Vladivostok, Russia
b Far Eastern Federal University, 690090 Vladivostok, Russia

Abstract: The results of a study of the crystal structure and electrical resistance of Si(111) silicon substrates after gallium deposition onto preformed surface reconstructions in the Ga/Si(111), Tl/Si(111), Au/Si(111) systems are presented. The work used the low-energy electron diffraction method to study changes in the structure of the surface crystal lattice, as well as a four-point probe method to measure the electrical resistance of substrates under in situ conditions. The influence of the concentration of adsorbed gallium atoms on the structural and electrical properties of films is considered. The role of surface reconstructions as a buffer layer for the subsequent growth of ultrathin films is demonstrated.

Keywords: adsorption, surface reconstruction, surface conductivity, low-energy electron diffraction, four-point probe method for measuring substrate resistance.

Received: 25.04.2024
Revised: 25.04.2024
Accepted: 25.04.2024

DOI: 10.61011/JTF.2024.08.58551.143-24



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