Multilayer mirrors based on Cr/Ti for X-Ray microscopy in the “water window”

The impact of thin boron carbide (B4C) layers on the internal structure and reflection coefficients of Cr/Ti multilayer mirrors at a wavelength of 2.74 nm Cr/Ti at normal incidence angles was studied. The mirrors had 400 periods of about 1.4 nm. The usage of interlayers made it possible to increase the reflection coefficients from 5% to 11% as a result of reduction the materials mixing at the interfaces. A significant part of the article is devoted to the issue of precision reflectometry using the laboratory reflectometer in the “water window” spectral range.