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Zhurnal Tekhnicheskoi Fiziki, 2024 Volume 94, Issue 8, Pages 1260–1268 (Mi jtf6828)

XXVIII International Symposium ''Nanophysics and Nanoelectronics'', Nizhny Novgorod, March 11-15, 2024
Physical electronics

Boron based X-ray multilayer mirrors for the spectral range 6.7–9 nm

R. A. Shaposhnikov, N. V. Zagaynov, V. N. Polkovnikov, N. I. Chkhalo, S. A. Garakhin, S. Yu. Zuev

Institute for Physics of Microstructures, Russian Academy of Sciences, 603087 Nizhny Novgorod, Russia

Abstract: The paper presents the results of a study of the reflective characteristics and structural parameters of multilayer X-ray mirrors based on a pair of Ru/B$_4$C materials, optimized for the spectral range 67–90 $\mathring{\mathrm{A}}$. A comparison of these structures with Mo/B$_4$C and La/B$_4$C mirrors is presented.

Keywords: multilayer X-ray mirrors, synchrotron applications, X-ray monochromators, X-ray lithography.

Received: 12.04.2024
Revised: 12.04.2024
Accepted: 12.04.2024

DOI: 10.61011/JTF.2024.08.58553.119-24



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